High Performance MEMS IMU with ThELMA-Double Technology

Abstract

This paper presents the design, architecture, and characterization of STMicroelectronics first prototype 6-axis Inertial Measurement Unit (IMU) manufactured with a novel micromachining technology. The platform novelty consists in the fabrication of structural and electrical elements using multiple independent thick epitaxial polysilicon layers. The performance of the device with respect to standard technology is deeply analyzed through the state-of-art characterization steps of STMicroelectronics IMU production. The improvements in terms of electrical figures, parametric stability and mechanical robustness are presented.