Micro-Gated-Field Emission Arrays with Single Carbon Nanotubes Grown on Mo Tips

Abstract

Using our approach previously reported, we have fabricated relatively large area micro-gated-field emission arrays with carbon nanotube (CNT) grown on Mo tips. By redesigning the device and fabrication processes, the percentage of single CNTs increased to about 50-70% with a substantial improvement in leakage current between gate and cathode and gate interceptive current. The I-V measurement of a 11000 cell array at a gate-to cathode voltage of 92 V showed an anode current of 1.2 mA, corresponding a current density of 0.57 A/cm2, with a gate current only 3.3% of the anode current.