Si3N4 Waveguide-Coupled Microdisk Resonators with a Quality Factor of 107

Abstract

We design and fabricate dispersion-engineered ∼830nm-thick Si₃N₄ waveguide-coupled microdisks. Our resonators show a loaded quality (Q)-factor of ∼1×10⁷. We observe optical parametric oscillations in a 345μm-radius microdisk with a threshold pump power of ∼50 mW in the waveguide.