Compact High-Precision Analog Temperature Controller for MEMS Inertial Sensors

Abstract

In this paper, we present an analog high-precision temperature controller designed to stabilize the temperature of MEMS inertial sensors with a short-term stability of better than $\pm 50 \ \mu^{\circ}\mathbf{K}$ and long-term stability of $\pm 250\ \mu^{\circ}\mathbf{K}_{\mathbf{p}-\mathbf{p}}$ measured over 12 hours. The fully analog design employing only DC signals makes it suitable for noise and interference sensitive applications as compared to AC coupled and digital methods. A linear power management method also has been implemented to minimize the power dissipation on the power stage to less than 5 mW. The whole controller implemented on a $21.3 \ \mathbf{mm}\times 21.3$ mm $10.84^{\prime\prime} \times 0.84^{\prime\prime})$ PCB.