Original tunable RF MEMS passive components integrated into a single chip

Abstract

This paper reports on an original rotating MEMS structure used to design RF tunable passive components operating in the X band. These components are either analog tuning MEMS variable capacitors or inductors, based respectively on surface variation or magnetic coupling variation. The choice of a rotating MEMS allows high displacements leading to high tuning ratios. A great advantage of the proposed solution relies in the possibility to integrate into the same chip several analog tuning RF MEMS (up to 8) on a surface reduced below 20mm2.