Zeeko precession for free-form polishing

Abstract

The aim of this work is an exploration of the options for optical surface polishing using the Zeeko IRP 100 machine and raster kinematics suitable for free-form polishing. For this purpose, aspheric surfaces were polished in raster prepolishing mode and then in Precession raster 3D shape correction, which is based on the Dwell time tool movement control. It was found that shape accuracy can achieve the value of approximately 35 nm RMS. The main inaccuracy was caused by the mid-spatial frequencies generated by the kinematics of the applied tools, which also limited the achievable values of microroughness.