Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope

Abstract

In this paper, we proposed a non-uniform radial width design of mode-matched vibratory ring gyroscope (VRG) to compensate the anisotropy in in-plane Young's modulus of (100) single crystal silicon (SCS). The measured frequency splits of the “wineglass” modes for VRGs with uniform width and modified width were about 180 and 46 Hz, respectively, which shows good agreement with the simulated results by finite element analysis (FEA). Then the electrostatic tuning was applied to eliminate frequency splits and realize mode-matching.