Studies on H2O-based Al2O3 deposited on as-grown CVD graphene

Abstract

In this paper, graphene films were synthesized by chemical vapor deposition. Raman spectra and transmission electron microscope indicated the graphene films were few-layer. Al₂O₃ films were grown directly onto the surface of graphene transferred on SiO₂/Si by H₂O-based atomic layer deposition method. Experiments revealed that the distribution of physically adsorbed H₂O molecules on the surface of graphene decided the morphology of Al₂O₃ film, and the O/Al ratio was close to stoichiometric condition of 1.5.