Application of capacitive displacement sensor on Joule Balance

Abstract

This paper gives a high precision capacitive displacement sensor design which is applied in the Joule Balance proposed by NIM, China. The plate of sensor is made by non-magnetic material, and is for the Joule Balance special use. The distance of the capacitive displacement sensor reaches to 1mm. And the resolution is less than 0.019µm full scale, in part range of the full scale, this data will be far less.