Microwave module for noncontact measurement of semiconductors

2010 20th International Crimean Conference "Microwave & Telecommunication Technology" Pub Date : 2010-11-11 DOI:10.1109/CRMICO.2010.5631197

V. M. Vladimirov, V. Konnov, V. Markov, V. N. Martynovskiy, N. Repin, V. N. Shepov

引用次数: 3

Abstract

Controlled microwave module for sensing of semiconductors is developed. The results of its application for measurement of minority-carrier lifetime in silicon are presented.

查看原文本刊更多论文

用于半导体非接触测量的微波模块

研制了用于半导体传感的可控微波模块。给出了该方法在硅中少数载流子寿命测量中的应用结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

2010 20th International Crimean Conference "Microwave & Telecommunication Technology"

自引率

0.00%

发文量