Interference device for roughness measurement

Abstract

Summary form only given. We propose an interference method based on a shearing polarisation interferometer for measuring surface roughness. It is based on the RPS approach, which preassumes: (i) infinitely extended object (all spatial frequency components of the radiation scattered by the object are present in registration zone); (ii) phase variance of the object is small; (iii) the correlation length of the inhomogeneity is larger than the wavelength.