Development of verification process for on-wafer measurement at millimeter-wave frequency

Abstract

The paper demonstrates useful devices for verification process of on-wafer measurement. Prior to evaluation of the devices, uncertainty analysis was conducted. Positional repeatability of probing was considered as a dominant uncertainty factor in the measurement. Based on the analysis, precise measurement systems with automatic probing system were developed to improve the measurement accuracy by reducing operator-derived error. Consequently, the verification devices were evaluated with lower uncertainty owing to automatic probing. The verification devices provided stable values independent from calibration techniques.