Geometry Details of Inertial Microsensors Influenced on Their Performance

Abstract

In the paper authors take into consideration results of analysis both MEMS accelerometers and gyroscopes under performance that can be changed by some geometry details modifications. Authors consider different types of shapes of springs to show, how they influence the total device operations. These springs are used in both vibratory sensors – accelerometers and gyroscopes. Because principle of operation of both sensors is based on vibratory system response, frequencies play main role in performance assessment. Fundamental quantities which are used for that are natural frequencies and Q-factors. They depend strongly on particular substructures of whole device geometry (because of variation of spring constant and damping coefficients).