Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor

T. Kume, S. Egawa, H. Mimura
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引用次数: 2

Abstract

The performance of an in situ internal stress measurement technique using a Shack–Hartmann sensor (SHS) is examined during nickel electrodeposition in concentrated nickel sulfamate solution. The stress is calculated from the change in the curvature of a test plate bent by stress. The curvature is measured by monitoring the wavefront of an expanded laser beam reflected at the substrate using an SHS. Applying the proposed method, curvature measurements were conducted and the repeatability and accuracy were estimated. In situ stress measurement with a current density of 2.1 mA/cm revealed a repeatability of approximately 1 MPa when the thickness of the nickel layer was
基于Shack的镍电铸内应力测量技术的发展。哈特曼传感器
研究了在浓硫酸镍溶液中镍电沉积过程中,利用Shack-Hartmann传感器(SHS)原位内应力测量技术的性能。应力是根据受应力弯曲的测试板的曲率变化来计算的。曲率是通过使用SHS监测在基片上反射的扩展激光束的波前来测量的。应用该方法进行了曲率测量,并对测量结果的重复性和精度进行了评估。电流密度为2.1 mA/cm的原位应力测量结果表明,当镍层厚度为1 MPa时,原位应力测量的重复性约为1 MPa
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