{"title":"Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor","authors":"T. Kume, S. Egawa, H. Mimura","doi":"10.2526/IJEM.21.25","DOIUrl":null,"url":null,"abstract":"The performance of an in situ internal stress measurement technique using a Shack–Hartmann sensor (SHS) is examined during nickel electrodeposition in concentrated nickel sulfamate solution. The stress is calculated from the change in the curvature of a test plate bent by stress. The curvature is measured by monitoring the wavefront of an expanded laser beam reflected at the substrate using an SHS. Applying the proposed method, curvature measurements were conducted and the repeatability and accuracy were estimated. In situ stress measurement with a current density of 2.1 mA/cm revealed a repeatability of approximately 1 MPa when the thickness of the nickel layer was","PeriodicalId":407646,"journal":{"name":"International Journal of Electrical Machining","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Electrical Machining","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2526/IJEM.21.25","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The performance of an in situ internal stress measurement technique using a Shack–Hartmann sensor (SHS) is examined during nickel electrodeposition in concentrated nickel sulfamate solution. The stress is calculated from the change in the curvature of a test plate bent by stress. The curvature is measured by monitoring the wavefront of an expanded laser beam reflected at the substrate using an SHS. Applying the proposed method, curvature measurements were conducted and the repeatability and accuracy were estimated. In situ stress measurement with a current density of 2.1 mA/cm revealed a repeatability of approximately 1 MPa when the thickness of the nickel layer was