{"title":"XPS and LEED Analyses on Zirconium Oxide Modified (100) Surface of Molybdenum","authors":"T. Kawakubo, H. Nakane, H. Adachi","doi":"10.1109/IVNC.2006.335229","DOIUrl":null,"url":null,"abstract":"It has been found that the work function of Mo(100) surface is able to reduce to 2.1 eV by heating it with a slight layer of zirconium oxide in a vacuum condition. Here the low work function surface, which is abbreviated to ZrO/Mo(100), was examined aiming to understand the reducing mechanism of the work function. Low-energy electron diffraction (LEED) is employed to analyze atomic arrangement at the surface, and X-ray photoelectron spectroscopy (XPS) to identify the surface chemical condition. The experiment gives almost the same results as for the ZrO/W(100) low work function surface","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"147 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 19th International Vacuum Nanoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2006.335229","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
It has been found that the work function of Mo(100) surface is able to reduce to 2.1 eV by heating it with a slight layer of zirconium oxide in a vacuum condition. Here the low work function surface, which is abbreviated to ZrO/Mo(100), was examined aiming to understand the reducing mechanism of the work function. Low-energy electron diffraction (LEED) is employed to analyze atomic arrangement at the surface, and X-ray photoelectron spectroscopy (XPS) to identify the surface chemical condition. The experiment gives almost the same results as for the ZrO/W(100) low work function surface