2.4 GHz low-pass filters with harmonic suppression using integrated passive device process

Abstract

Two low pass filters for 2.4GHz are developed using IPD (integrated passive device) process. The IPD process uses BCB as dielectric for inductor and SiO2 for capacitor on glass. Low-pass filters using lump elements are synthesized based on standard filter synthesis process. Shunt capacitors are added to inductors to create transmission zeros for harmonic suppression. Low insertion loss and good harmonic suppression at 2nd and 3rd order are observed in both types of low pass filters in simulation and measurement.