A. Szeghalmi, V. Beladiya, S. Alam, S. Schröder, S. Riese
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引用次数: 0
Abstract
Here, we discuss the development of HfO2 PEALD thin films for laser applications. Antireflection coatings and dielectric mirrors for 355, 532 and 1064 nm wavelength and their laser damage resistance are presented.