Artificial intelligence in process control of pulsed laser deposition

Abstract

Implementation of process control of pulsed laser deposition (PLD) requires actuators, sensors and a “materials and processing” knowledge base. Improvements in quality and reproducibility of material deposits are achieved by using this knowledge base to drive the process toward desired operating regions. The knowledge base includes experimentally determined, empirical relationships describing the complex dynamical interactions of laser parameters. Intelligent control based on this description can be implemented to reduce process disorder and efficiently produce consistent coatings with desired properties.