Microwave investigation of ferroelectric bulk and film materials

Abstract

A method for measuring microwave properties of bulk and film ferroelectric materials has been developed. Waveguide is partially filled by studied material samples, whose dielectric constant /spl epsiv/ /spl sim/ 10/sup 2/ - 10/sup 3/ and losses tan/spl delta/ /spl sim/ 1-10/sup -3/ can be found from the frequency (f) dependence of S-parameters measured by network analyzer. S/sub 11/(f) or S/sub 21/(f) dependencies should be investigated in dependence on sensitivity. Studied films are deposited onto dielectric substrates, and film-on-substrate "sandwich" is centrally located in the waveguide. Software was elaborated to get this "sandwich" scattering parameters, from which film /spl epsi/ and tan/spl delta/ can be calculated. Proposed method of the film investigation requires no electrode deposition, so film dielectric constant and loss might be obtained at various stages of film processing.