100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator

Abstract

This paper describes the implementation of a 100 MHz oscillator based on a Lamé-mode MEMS resonator polarized with a low dc bias voltage (< 5 V). Under low vacuum, the MEMS resonator exhibits high quality factors up to 60000 ensuring reasonable performance in terms of measured phase noise: −100 dBc/Hz @ 1kHz from carrier. A specific capacitive actuation/detection scheme ensures an active cancellation of the feedthrough capacitances and facilitates the balance by the rack-level sustaining electronics of the equivalent 50 kΩ motional impedance (on resonance) of the 100 MHz resonator.