Angstrom-level Calibration of Eight Inch Flats using a Scanning Fizeau Interferometer

A. Anderson, L. D. La Fleur, M. Kasserls, D. Zweig
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Abstract

A scanning Fizeau interferometer is used to measure a set of eight inch reference flats. The uncertainty in the measured figure is less that 2 Årms.
用扫描菲索干涉仪对8英寸平板进行埃级校准
扫描菲索干涉仪用于测量一组8英寸参考平面。测量图的不确定度小于2 Årms。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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