Design and Fabrication of Ozone Sensor based on WO3 thin film

Abstract

A Micro-Electro-Mechanical Systems based tungsten trioxide thin film micro-ozone sensor is prepared using physical vapor deposition techniques. Given a sufficiently high working temperature, the resistance of the tungsten trioxide film increases linearly with an increasing ozone concentration. The effects of variations in the working temperature on the resistance of the tungsten trioxide sensing layer are suppressed by a PID feedback control system implemented in LabVIEW. It is shown that a working temperature of 250°C results in the device’s maximum sensitivity (3.32 MΩ/ppm) and minimum response time (17 seconds).