Automate generation of incremental linear networks masks by using photocomposition method with with multiple microphotographical reductions using laser microsystems

Abstract

The paper treats high precision micro technologies for automate generation of linear incremental networks masks by using the photocomposition method with multiple micro photographical reductions using laser high sensitivity microsystems, for the manufacture of micro-sensors and micro-transducers for micro displacements with endowment in industrial and metrological laboratories. These laser micro technologies allow automate generation of incremental networks masks with incremental step of 0,1 µm ensuring necessary accuracy according to European and international standards as well as realization of linear incremental photoelectric rules divisor and vernier as marks ultra precise components of micro-sensors and microtransducers for micro displacements.