A microelectromechanical quartz rotational rate sensor for inertial applications

Abstract

A quartz rotational rate sensor based on the Coriolis effect is presented. The sensor which consists of a microminiature double-ended quartz tuning fork and supporting structure, all fabricated chemically from a single wafer of monocrystalline piezoelectric quartz provides a simple, elegant and reliable measurement of rotational velocity. The theory of operation, performance parameters and applications in the aerospace, industrial, commercial and automotive sectors are provided.