{"title":"Laser Spectroscopic Diagnostics for CVD Diamond Growth","authors":"R. Shaw, W. Whitten, J. Ramsey","doi":"10.1364/laca.1992.tha2","DOIUrl":null,"url":null,"abstract":"Chemical vapor deposition (CVD) methods have become increasingly important for the manufacture of technologically-significant thin films. Numerous examples exist in the semiconductor and wear hardening coatings industries. The growth of polycrystalline diamond thin films from light hydrocarbons has recently received great interest, and several U. S. and foreign manufacturers have already begun to market products.","PeriodicalId":252738,"journal":{"name":"Laser Applications to Chemical Analysis","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Applications to Chemical Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/laca.1992.tha2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Chemical vapor deposition (CVD) methods have become increasingly important for the manufacture of technologically-significant thin films. Numerous examples exist in the semiconductor and wear hardening coatings industries. The growth of polycrystalline diamond thin films from light hydrocarbons has recently received great interest, and several U. S. and foreign manufacturers have already begun to market products.