Pull-in Voltage of Bimorph Cantilever Based MEMS Switch Using COMSOL Multiphysics

Abstract

This paper presents the pull-in voltage study of Bimorph electrostatic actuated Cantilever beam. Electrostatic actuation requires very high actuation Voltage to pull the cantilever. Bimorph Cantilever beam could be used to reduce the actuation Voltage. COMSOL Multiphysics Electromechanics interface is used to simulate the Pull-in Voltage. We Compare the Pull-in Voltage of different Bimorph Cantilever beam Materials. The Analytical and Simulation result shows that the pull-in voltage of Aluminum and Gold Bimorph Cantilever is 4.05V and is less compared to other Bimorph Cantilever beam materials simulated.