Design And Fabrication Of In-plane Ridge Waveguide Surface Emitting Lasers With Two Dry Etched 45/spl deg/ Total Reflection Mirrors

LEOS 1991 Summer Topical Meetings on Epitaxial Materials and In-Situ Processing for Optoelectronic Devices. Photonics and Optoelectronics Pub Date : 1900-01-01 DOI:10.1109/LEOSST.1991.639018

C. Chao, K. Law, J. Merz

引用次数: 0

Abstract

In-plane surface emitting lasers (IPSELs) with 450 internal total reflection mirror(s) or external 4 5 O beam deflector@) may be used for optoelectronic integrated circuit (OEIC).1-3 In this work we describe a new ridge waveguide IPSEL (RW-IPSEL) structure with two 450 dry etched mirrors and an epitaxial grown distributed Bragg reflector (DBR). A 5pm wide device has continuous-wave (CW) threshold current at 1OmA which is a significant improvement among similar IPSELs.

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双干蚀刻45/spl度全反射镜的面内脊波导面发射激光器的设计与制造

平面内表面发射激光器(IPSELs)可用于光电集成电路(OEIC)，其内部有450个全反射镜(s)或外部有45个O光束偏转器@)。在这项工作中，我们描述了一种新的脊波导IPSEL (RW-IPSEL)结构，该结构具有两个450干蚀刻镜和一个外延生长分布布拉格反射器(DBR)。5pm宽的器件具有1OmA的连续波阈值电流，这在同类ipsel中是一个显著的改进。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

LEOS 1991 Summer Topical Meetings on Epitaxial Materials and In-Situ Processing for Optoelectronic Devices. Photonics and Optoelectronics

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