The present state of quantitative electron probe microanalysis

Abstract

In quantitative electron probe microanalysis uncorrected concentrations are obtained by measuring characteristic x-ray intensities from specimen and standard. Experimental aspects are discussed briefly. Corrections must be applied to take account of the following effects: absorption of x-rays emerging from the specimen, fluorescence excitation, electron backscattering and the variation of electron stopping power with composition. The physical basis of these effects and practical methods for calculating corrections are described. The special factors applying to the analysis of light elements (atomic number <11) are considered. The important part played by digital computers is discussed. Finally, the analytical accuracy obtainable at present and future developments in both theoretical and practical aspects are considered