Design of a MEMS comb resonator for above 15 KHz with its effective mass of resonant structure less than 30 nanogram using MEMS CAD

Abstract

In a comb resonator the spring mass and dynamic mass is the parameter for generating resonant frequency and the resonance frequency of above 15 KHz is the main challenge for applications like accelerometer, oscillator and gyros. The electrostatic force helps in the generation of resonant frequency and created between the two electrodes for actuation and sensing making it two port resonator. This paper presents deals with design of computing spring constant for support is 0.355N/m and we obtained the effective mass of the structure as 24.1 nanogram. Also the resonant frequency as 19.29 KHz. Also checked the effect of capacitance for the input. Also we considered the inclination of comb fingers and its relative effects on the design.