{"title":"3D Dual-Shell Micro-Resonators for Harsh Environments","authors":"M. Asadian, Danmeng Wang, Yusheng Wang, A. Shkel","doi":"10.1109/PLANS46316.2020.9109972","DOIUrl":null,"url":null,"abstract":"This paper presents the recent advancements in the development of three-dimensional fused quartz dual-shell microresonators for environmentally-challenging applications, where the precision measurements are made through shock and vibrations. The dual-shell micro-resonators made from fused quartz and demonstrate a mechanical Q-factor of well above 1 million. An integration and assembly process for capacitive actuation and detection of such resonators using a silicon-in-glass electrode substrate was developed, and electrostatic tuning of $\\mathbf{n}=\\mathbf{2}$ wineglass using out-of-plane electrodes was demonstrated experimentally. We also present a simulation framework based on the Finite Element Method. The modeling approach was used to derive the critical design parameters of the dual-shell micro-gyroscopes for survivability under harsh shock waveforms. The developed 3D dual-shell structure is a potential solution for microresonators and gyroscopes for operation in harsh environments.","PeriodicalId":273568,"journal":{"name":"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLANS46316.2020.9109972","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
This paper presents the recent advancements in the development of three-dimensional fused quartz dual-shell microresonators for environmentally-challenging applications, where the precision measurements are made through shock and vibrations. The dual-shell micro-resonators made from fused quartz and demonstrate a mechanical Q-factor of well above 1 million. An integration and assembly process for capacitive actuation and detection of such resonators using a silicon-in-glass electrode substrate was developed, and electrostatic tuning of $\mathbf{n}=\mathbf{2}$ wineglass using out-of-plane electrodes was demonstrated experimentally. We also present a simulation framework based on the Finite Element Method. The modeling approach was used to derive the critical design parameters of the dual-shell micro-gyroscopes for survivability under harsh shock waveforms. The developed 3D dual-shell structure is a potential solution for microresonators and gyroscopes for operation in harsh environments.