Frequency Modulated Operation in a Silicon MEMS Gyroscope with Quatrefoil Suspension System

Madan Parajuli, G. Sobreviela, A. Seshia
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引用次数: 2

Abstract

This paper reports a MEMS Gyroscope based on mechanical frequency modulation. The gyroscope operates by tracking the resonant frequencies of two high-Q degenerate elliptical modes (∼426 kHz) in a vacuum packaged MEMS gyroscope with a novel quatrefoil suspension system, fabricated on a (100) single-crystal silicon substrate. The frequency-based measurement of the input angular rate is realized using two digital phase-locked loops and implementing electrostatic frequency tuning to decrease the frequency split between the two near-degenerate modes from 4 Hz to 0.8 Hz. Measured results demonstrate an angle random walk (ARW) and bias instability (BI) of 0.917 ◦/$\sqrt h $ and 6.7 ◦/h respectively, benchmarking favorably in comparison with other state-of-the-art frequency modulated (FM) gyroscopes.
带有四翼悬架系统的硅MEMS陀螺仪的调频操作
本文报道了一种基于机械调频的微机电系统陀螺仪。陀螺仪的工作原理是跟踪真空封装MEMS陀螺仪中两个高q简并椭圆模式(~ 426 kHz)的谐振频率,该陀螺仪具有一种新型的四箔悬挂系统,制造在(100)单晶硅衬底上。利用两个数字锁相环实现输入角速率的基于频率的测量,并通过静电频率调谐将两个近简并模式之间的频率分裂从4 Hz减小到0.8 Hz。测量结果表明,角度随机漫步(ARW)和偏置不稳定性(BI)分别为0.917◦/$\sqrt h $和6.7◦/h,与其他最先进的调频(FM)陀螺仪相比,基准表现良好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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