Effect of lead zirconate titanate piezoceramic material on the deflection of MEMS based sandwiched cantilever beamfor piezoelectric actuation

Abstract

This paper investigates the deflection of micro-electro-mechanical system (MEMS) based sandwiched cantilever beam for piezoelectric actuation using eight of the popular lead zirconatetitanate (PZT)piezoceramic material. The simulation for the investigation was carried away in COMSOL multiphysicssoftware environment. For the investigation of a certain model, the lowest tip deflection is found to be 38.074 nm for PZT-8 and the highest tip deflection is found to be 82.965 nm for PZT-5H.