The Effect of Discharge Gap on Microwave Discharge

Abstract

In order to study the effect of discharge gap on microwave discharge, the paper has carried out a simulation for the particles' density distribution, conductivity distribution and the resulting frequency drift in discharge gaps of different sizes. The results show that, the smaller the gap radius and the greater the gap depth, the higher the resonance frequency; the gap size affected the change of particle concentration during the resonance process; and the parameters of resonance characteristics were different at the equilibrium time.