S. Luby, M. Jergel, M. Benkovicova, P. Šiffalovič, J. Ivančo, K. Vegso, E. Majková, R. Rella, M. G. Manera, S. Capone, I. Vávra
{"title":"Sensitivity and long-term stability of γ-Fe2O3 and CoFe2O4 nanoparticle gas sensors for NO2, CO and acetone sensing — A comparative study","authors":"S. Luby, M. Jergel, M. Benkovicova, P. Šiffalovič, J. Ivančo, K. Vegso, E. Majková, R. Rella, M. G. Manera, S. Capone, I. Vávra","doi":"10.1109/ASDAM.2014.6998691","DOIUrl":null,"url":null,"abstract":"Gas sensors based on γ-Fe<sub>2</sub>O<sub>3</sub> and CoFe<sub>2</sub>O<sub>4</sub> nanoparticles (NPs) were prepared by Langmuir-Schaeffer deposition onto Al<sub>2</sub>O<sub>3</sub> and auxilliary Si substrates. NPs with the size of 6.4 nm (Fe<sub>2</sub>O<sub>3</sub>) and 7.6 nm (CoFe<sub>2</sub>O<sub>4</sub>) and polydispersity of 9 % were fabricated by chemical route. NP arrays were analyzed by GIXRD, SEM, TEM, DLS and ellipsometry. Fe<sub>2</sub>O<sub>3</sub> sensors show high response of 38 for 500 ppb of strongly oxidizing NO<sub>2</sub>. The response of CoFe<sub>2</sub>O<sub>4</sub> sensors is 10 at 5 ppm of NO<sub>2</sub>. Sensitivities are lower with reducing CO and acetone gases. After one year storage at room temperature, a 6 % decrease of response was found. The sensor sensitivities are discussed comparing with the best published results so far.","PeriodicalId":313866,"journal":{"name":"The Tenth International Conference on Advanced Semiconductor Devices and Microsystems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Tenth International Conference on Advanced Semiconductor Devices and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2014.6998691","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Gas sensors based on γ-Fe2O3 and CoFe2O4 nanoparticles (NPs) were prepared by Langmuir-Schaeffer deposition onto Al2O3 and auxilliary Si substrates. NPs with the size of 6.4 nm (Fe2O3) and 7.6 nm (CoFe2O4) and polydispersity of 9 % were fabricated by chemical route. NP arrays were analyzed by GIXRD, SEM, TEM, DLS and ellipsometry. Fe2O3 sensors show high response of 38 for 500 ppb of strongly oxidizing NO2. The response of CoFe2O4 sensors is 10 at 5 ppm of NO2. Sensitivities are lower with reducing CO and acetone gases. After one year storage at room temperature, a 6 % decrease of response was found. The sensor sensitivities are discussed comparing with the best published results so far.