I. Kuznetsov, J. Filevich, F. Dong, M. Woolston, W. Chao, E. Anderson, E. Bernstein, D. Crick, J. Rocca, C. Menoni
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Abstract
We demonstrate nano-scale 3-dimensional chemical imaging by extreme ultraviolet laser with 75 nm lateral, 20 nm depth resolution, and 0.01 aM sensitivity. 3D composition images of a single micro-organisms were obtained.
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