High-Q A0 Mode Plate Wave Resonator on X-cut LiNbO3 Films with Dummy Electrode Arrays

Abstract

This paper presents a high-Q A0 mode plate wave resonator with dummy electrode arrays on a suspended X-cut LiNbO3 film. The designed resonators are simulated using the Finite Element Method, and the mode shapes of the A0 and transverse modes are analyzed. Compared to conventional resonators, more energy is concentrated in the central region, and lead resistance is reduced using dummy electrode arrays, resulting in a significant increase in the Q factor. The designed resonators are fabricated on a 4-inch X-cut LiNbO3-on-insulator wafer with a 4-mask process flow. The measured Q factor at the series resonant frequency (about 1.2 GHz) increases from 460 of the conventional resonator to 998 using dummy electrode arrays. The proposed structure improves the Q factor without additional process and shows great potential in high-performance Lamb wave resonators and filters.