Advanced process library irradiation parameter modeling and analysis techniques

Abstract

The irradiation experimental analysis of chips can obtain irradiation data of advanced processes, which is beneficial to guide the research of new generation of anti-irradiation chips. In this paper, based on the GDS layout of the advanced process library, we firstly design the GDS layout hierarchy information extraction technology and implement the standard cell TCAD model automatic generation technology, then design the algorithm to generate irradiation parameters for heavy ion bombardment simulation experiments, and finally analyze the experimental data to establish the irradiation database. The experimental results show that it is feasible to establish an automatic irradiation data acquisition scheme based on the GDS layout of the advanced process library.