Diaphragm thickness-dependent sensitivity in a glass-based guided-wave optical microphone

Abstract

Our original guided-wave optical microphone consists of a diaphragm and a single-mode optical waveguide. Sensitivity is an important specification for microphones, and is theoretically known to be dependent on diaphragm thickness. In this study, we fabricated three microphones with different diaphragm thicknesses, and experimentally examined the diaphragm thickness-dependent sensitivity.