MEMS-based piezoelectric micropump for precise liquid handling

Abstract

A micropump is described which uses a piezoelectric actuator to deliver liquid from pump pulsations at volumetric flow rates approaching nl min-1 even at high loading levels (high output pressures). This micropump uses a bimorph which bends when a voltage is applied to the piezo-actuator. By inserting valves into the device, the pump can operate continuously with volumetric pumping rate determined by the frequency of the driving voltage to the pump chamber.