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NUMERICAL MODELING OF RF-RF HYBRID PLASMA TORCHES AND PARAMETRIC STUDY FOR VARIOUS GEOMETRIC, FLOW AND ELECTRIC CONFIGURATIONS

Proceeding of Progress in Plasma Processing of Materials, 2001 Pub Date : 1900-01-01 DOI:10.1615/itppc-2000.440
D. Bernardi, V. Colombo, G. Coppa, E. Ghedini, A. Mentrelli
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rf-rf混合等离子体炬的数值模拟及各种几何、流动和电结构的参数化研究
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Proceeding of Progress in Plasma Processing of Materials, 2001
Proceeding of Progress in Plasma Processing of Materials, 2001
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