Analyzing the 2nd Harmonic Emissions of a BAW Resonator Undergoing Lateral Mode Excitation

Abstract

For the first time of which we are aware, high frequency resolution phase and magnitude measurements of the 2nd harmonic (H2) emissions response of a BAW resonator are recorded and analyzed. A circular resonator exhibiting distinct lateral modes and H2 emissions rattles is analyzed in a variety of ways: First using a nonlinear extended BVD model to relate both the phase and magnitude of H2 emissions to its linear S11 response, then via an analytical model of H2 emissions, and finally via a nonlinear 2D FEM model. The H2 phasor emissions of a resonator having a practical shape, and thus exhibiting complex lateral mode and H2 rattle behavior is measured. A measurement-based H2 model is constructed, and then is used to model the H2 emissions response of an anti-series resonator pair.