Origin of wide retention distribution in 1T Floating Body RAM

M. Aoulaiche, T. Nicoletti, A. Veloso, P. Roussel, E. Simoen, C. Claeys, G. Groeseneken, M. Jurczak
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引用次数: 7

Abstract

The variability of 1T FBRAM performances is investigated. The VG read window and the state "1" distribution are correlated with the number of holes injected during the write "1" related to the electric field in the S/D junctions. Besides, the origin of wide retention time distribution has been correlated with the distribution of G-R center in the Si band gap. Single defect with the Si midgap energy level can generate a leakage path affecting strongly the cell retention time. This can explain also wide retention distribution. Thight control of such defects poses extreme challange for the manufacturing of FBRAM.
1T浮体内存宽滞留分布的原因
研究了1T FBRAM性能的变异性。VG读窗口和状态“1”分布与写入“1”时注入的空穴数相关,这与S/D结中的电场有关。此外,宽保留时间分布的起源与硅带隙中G-R中心的分布有关。具有Si中隙能级的单个缺陷会产生泄漏路径,对电池保留时间有很大影响。这也可以解释为何留存率分布如此之广。这些缺陷的思想控制对FBRAM的制造提出了极大的挑战。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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