Off Stoichiometric Silicon Oxide Applied to Enhance the Silicon Responsivity up to UV Region

Abstract

Silicon Rich Oxide (SRO) is a material compatible with silicon integrated technology, besides it has photoluminescentproperties. When SRO is illuminated with UV radiation emission in the range of 600 to 800 nm take place. This radiation has been applied to a silicon PN junction in order to expand the capabilities of silicon improving its detection properties. In this work a more precise characterization of a sensor made of silicon and SRO is done. The response of this sensor goes from 200 nm to standard Si detection range, and in the range of 200 to 400 nm it increases with the wavelength.