Metrology

Abstract

The Metrology Chapter identifies emerging measurement challenges from devices, systems, and integration of new materials in the semiconductor industry and describes research and development pathways for meeting them. This includes, but not limited to, measurement needs for extending CMOS, accelerating beyond CMOS technologies, novel communication devices, sensors and transducers, materials characterization and structure function relationships. This also includes metrology required in research and development, and process control in manufacturing environments [1]–[4].