Laser Cleaning of Oxidized Metalic Surfaces

CLEO/Europe Conference on Lasers and Electro-Optics Pub Date : 1998-09-14 DOI:10.1109/CLEOE.1998.719456

P. Alloncle, J. Isselin, M. Provost, M. Autric

引用次数: 0

Abstract

The surface cleaning effect is investigated here using Nd YAG and Excimer User irradiation The different kind of mechanisms encountered are studied as function of laser interaction parameters: energy density: 0.1J/cm2 - 10J/cm2, pulse duration : 10ns - 20ns, wave length radiation: 248nm - 532nm - 1064nm, laser repetition rate: 1Hz - 200Hz.

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氧化金属表面的激光清洗

采用准分子用户辐照和YAG辐照研究了不同的表面清洁机理，研究了激光相互作用参数的函数关系:能量密度0.1J/cm2 ~ 10J/cm2，脉冲持续时间10ns ~ 20ns，波长辐射248nm ~ 532nm ~ 1064nm，激光重复频率1Hz ~ 200Hz。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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CLEO/Europe Conference on Lasers and Electro-Optics

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