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Controlling pinhole radius and areal density in a-Si/SiOx using metal-assisted chemical etching

SiliconPV 2021, The 11th International Conference on Crystalline Silicon Photovoltaics Pub Date : 1900-01-01 DOI:10.1063/5.0089213
Caroline Lima Salles, W. Nemeth, H. Guthrey, S. Agarwal, P. Stradins
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利用金属辅助化学蚀刻技术控制a-Si/SiOx的针孔半径和面密度
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SiliconPV 2021, The 11th International Conference on Crystalline Silicon Photovoltaics
SiliconPV 2021, The 11th International Conference on Crystalline Silicon Photovoltaics
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