MEMS Microphone Array for Airborne Ultrasonic 3D Tracking

Abstract

This contribution illustrates how to design a newly developed modular hardware platform to enable hand tracking. The proposed system features Infineon's innovative MEMS transceivers combining best-in-class audio performance and ultrasonic pulse-echo measurement capabilities. Specifically, the MEMS device can be excited with ultrasonic bursts between 20000 Hz and 90000 Hz to function as ultrasonic speaker. The devices have a miniaturized package (3.6× 2.5×1 mm3), consume very little power (<2 mW), achieve an SNR of 70 dB(A), and have standard microphone interfaces. In this work we demonstrate how these devices can be effectively integrated, meeting the more stringent requirements of battery-powered miniaturized systems, such as True-Wireless Stereo (TWS) earbuds.