Chih-Chen Lee, Chung-yu Lee, S. Chang, Shih-Hsun Chen
{"title":"Investigating the Planarization of Al0.5CoCrFeNi2 High-Entropy Thin Films Through Chemical Mechanical Polishing","authors":"Chih-Chen Lee, Chung-yu Lee, S. Chang, Shih-Hsun Chen","doi":"10.1007/s44210-023-00016-w","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":129128,"journal":{"name":"High Entropy Alloys & Materials","volume":"80 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"High Entropy Alloys & Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s44210-023-00016-w","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}