Computational program to evaluate local defects type Chalmers Test on a reflective optical surface

B. Canales-Pacheco, E. Rueda-Soriano, Luis Alberto RUIZ-AGUILAR, Raymundo Sergio Noriega-Loredo
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Abstract

A computational tool is developed to measure the local deformations in optical surfaces from the interference patterns obtained by the Chalmers test principle and from the analysis of a reflective optical surface using a commercial Fizeau interferometer of the ZYGO. The tests were made on a concave spherical mirror with a radius of curvature of 60 cm and a diameter of 13 cm. To obtain the measurements of local deformations, a computational tool proposed for the localization of dark fringes is used by evaluating the maximum and minimum of the image obtained in the interference patterns. The results obtained show that the computational tool allows locating fringes within an interference pattern, allowing faster inter-fringe measurements and assigning an error on the surface in terms of wavelength.
评价反射光学表面局部缺陷型查尔默斯试验的计算程序
利用查尔默斯测试原理得到的干涉图样和ZYGO的商用菲索干涉仪对反射光学表面的分析,开发了一种计算工具来测量光学表面的局部变形。实验在曲率半径为60 cm,直径为13 cm的凹面镜上进行。为了获得局部变形的测量值,提出了一种用于暗条纹定位的计算工具,通过评估在干涉模式中获得的图像的最大值和最小值。结果表明,该计算工具可以定位干涉图样内的条纹,允许更快的条纹间测量和分配波长方面的表面误差。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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