Combining CMOS and MEMS technologies in a monolithic system for observing filter pollutions

S. Heinz, K. Erler, T. Walter, R. Seidel, J. Horstmann, Marco Neubert, A. Pohle, Ch. Gross, P. D. Gabriel
{"title":"Combining CMOS and MEMS technologies in a monolithic system for observing filter pollutions","authors":"S. Heinz, K. Erler, T. Walter, R. Seidel, J. Horstmann, Marco Neubert, A. Pohle, Ch. Gross, P. D. Gabriel","doi":"10.1109/IECON.2011.6119973","DOIUrl":null,"url":null,"abstract":"The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.","PeriodicalId":105539,"journal":{"name":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IECON.2011.6119973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.
将CMOS和MEMS技术结合在一个单片系统中用于观察滤波器污染
原则上,CMOS和MEMS技术的结合为创造复杂、紧凑、可靠的解决方案开辟了新的潜力。在目前的研究工作中,已经开发了一个“SmartFilter”模块,用于观察吸入和过滤系统中过滤器的污染,该模块具有压阻式压力传感器,控制器核心,电源管理,数字和模拟信号处理以及RFID接口,允许无线传输能量和数据。对系统设计、rfid前端(包括天线)、模拟信号设计和封装等方面进行了讨论。该创新的基础是将压力传感器制造模块集成到现代350纳米CMOS混合信号半导体技术中。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信