S. Heinz, K. Erler, T. Walter, R. Seidel, J. Horstmann, Marco Neubert, A. Pohle, Ch. Gross, P. D. Gabriel
{"title":"Combining CMOS and MEMS technologies in a monolithic system for observing filter pollutions","authors":"S. Heinz, K. Erler, T. Walter, R. Seidel, J. Horstmann, Marco Neubert, A. Pohle, Ch. Gross, P. D. Gabriel","doi":"10.1109/IECON.2011.6119973","DOIUrl":null,"url":null,"abstract":"The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.","PeriodicalId":105539,"journal":{"name":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IECON.2011.6119973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.